Optical piezo vertical stage
2. The maximum loading is 150 g
3. High-precision 1 nm and standard 100 nm typical resolution
The optical sensing element is applied as the core for position feedback. This product series is suitable for any application requiring high-precision positioning and motion control. It contains not only reliable and stable positioning abilities but also various resolution options.
Minimum incremental motion (Standard Linear Series)
Minimum incremental motion (High Precision Linear Series)
Motion Performance
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Max. speed
|
10 mm/s
|
10 mm/s
|
|
Encoder option
|
Open loop
|
Closed loop
|
|
Encoder resolution
|
N/A
|
0.1 µm (Standard Series)
1 nm (High Precision Series) |
|
Min. incremental motion
|
N/A
|
0.3 µm (Standard Series)
15 nm (High Precision Series) |
|
Bidirectional repeatability
|
N/A
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0.5 µm (Standard Series)
50 nm (High Precision Series) |
Mechanical Properties
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Max. load
|
150 g
|
|
Max. Axial load
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150 g
|
|
Guide type
|
Crossed roller bearings
|
|
Pitch
|
±200 µrad
|
|
Yaw
|
±100 µrad
|
Options
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Material
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Anodized aluminum as standard ; Stainless steel
|
|
Vacuum
|
Atmospheric as standard ; HV (1E-6 mbar)
|
|
Home function
|
Yes
|
|
Limit function
|
Yes
|
Type
Drawing
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Type 10：Travel 10 mm
