半導体産業
APPLICATIONS
Semiconductor Related Equipment、Inspection Equipment
PRODUCTS USED
リニアガイド--スタンダードタイプ -BGX
1. フリーコンビネーション
2. レール共用設計
3. 総ボールタイプ＆リテーナタイプ両者兼有
4. 防塵バリエーション豊富"
リニアガイド--ミニチュアタイプ- MBC
1. 世界通用寸法に全面的に対応可能
2. ケージ型 潤滑力アップ
3. 塑件迫緊系統確保精度
4. 特許ロック設計、高精度達成
5. 防塵シール装着"
Optical piezo vertical stage
1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. High-precision 1 nm and standard 100 nm typical resolution
Inductive piezo linear stage
1. Offers 4 kinds of travel range (20mm / 28mm / 36mm / 44mm)
2. The maximum loading is up to 4 kg
3. 37 nm typical resolution"
Inductive piezo vertical stage
1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. 37 nm typical resolution"
Optical piezo controller
1. Only compatible with the optical piezo stage
2. Compact size
3. Expandable (Controller stackable)
4. Provides the axis quantity from 1 to 3
5. Selective control interface (USB/SMA)
6. Customized design
Inductive piezo controller
1. Only compatible with the inductive piezo stage
2. Compact size
3. Expandable (Controller stackable)
4. Provides the axis quantity from 1 to 3
5. Customized design"
