• Inductive piezo vertical stage

Inductive piezo vertical stage

1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. 37 nm typical resolution"
モデル : PST8E510A
The inductive sensing element is applied as the core for position feedback. This product series provides not only the practical positioning resolution but also the more compact size, the better tolerance for the environment and the competitive price. It is highly adaptable to any application requiring high-precision positioning, micro-nano motion control as well as in the vacuum environment.
The inductive piezo vertical stage offers 1 kind of travel range which is 10 mm. The maximum loading is 150 g with 37 nm typical resolution.

         Minimum incremental motion         
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Mechanical Properties

Max. load
150 g
Max. Axial load
150 g
Guide type
Crossed roller bearings
Pitch
±200 µrad
Yaw
±100 µrad

Motion Performance

Max. speed
10 mm/s
10 mm/s
Encoder option
Open loop
Closed loop
Encoder resolution
N/A
37 nm
Min. incremental motion
N/A
150 nm
Bidirectional repeatability
N/A
300 nm

Options

Material
Anodized aluminum as standard ; Stainless steel
Vacuum
Atmospheric as standard ; HV (1E-6 mbar)
Home function
Yes
Limit function
Yes


Type

Drawing

Download


Type 10: Travel 10 mm

pst8e510a_300x225.jpg

(PST8E510A)

pst8e510a_600.jpg



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