Inductive piezo vertical stage
1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. 37 nm typical resolution"
2. The maximum loading is 150 g
3. 37 nm typical resolution"
モデル :
PST8E510A
The inductive sensing element is applied as the core for position feedback. This product series provides not only the practical positioning resolution but also the more compact size, the better tolerance for the environment and the competitive price. It is highly adaptable to any application requiring high-precision positioning, micro-nano motion control as well as in the vacuum environment.
The inductive piezo vertical stage offers 1 kind of travel range which is 10 mm. The maximum loading is 150 g with 37 nm typical resolution.
The inductive piezo vertical stage offers 1 kind of travel range which is 10 mm. The maximum loading is 150 g with 37 nm typical resolution.
Minimum incremental motion
Mechanical Properties
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Max. load
|
150 g
|
|
Max. Axial load
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150 g
|
|
Guide type
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Crossed roller bearings
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|
Pitch
|
±200 µrad
|
|
Yaw
|
±100 µrad
|
Motion Performance
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Max. speed
|
10 mm/s
|
10 mm/s
|
|
Encoder option
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Open loop
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Closed loop
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Encoder resolution
|
N/A
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37 nm
|
|
Min. incremental motion
|
N/A
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150 nm
|
|
Bidirectional repeatability
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N/A
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300 nm
|
Options
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Material
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Anodized aluminum as standard ; Stainless steel
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|
Vacuum
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Atmospheric as standard ; HV (1E-6 mbar)
|
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Home function
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Yes
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Limit function
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Yes
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